CALIFORNIA INSTITUTE OF TECHNOLOGY MICROMACHINING LABORATORY
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EE 185 - MEMS/NEMS Technology and Devices

Professor: Dr. Yu-Chong Tai

TA: Ray Huang, Mike Liu, Jeffrey Lin and Justin Kim

Office Hours:

Ray

TBD

         Location: Moore 68

         Office hours are subject to change.
         Questions can be also asked via email.

Course Materials: Class Notes and recent publications.

Reference Books:

1. S. Wolf and R.N. Tauber, "Silicon Processing" Vol. 1, 2 and 3, Lattice Press
2. M. Madou, "Fundamentals of Microfabrication"
3. S. M. Sze, "Semiconductor Sensors"
4. Kovacs, "Micromachined Transducer Sourcebook"

Description:

9 units (3-0-6); first term. This is a senior/1st-year graduate course on fundamental MEMS technology and devices (including silicon techniques). Topics will first emphasize the fundamental technologies such as “bulk” micromachining, “surface” micromachining, LIGA, bonding/sealing, packaging and even nanotechnology. Various MEMS and NEMS devices (such as Optical MEMS, RF MEMS, Bio MEMS, and lab-on-a-chip) and some fundamental MEMS theories will also be covered.

Syllabus

Lecture Notes

1. MEMS Introduction

2. Surface Cleaning

3. Wet Etching

4. Dry Etching (a)

5. Dry Etching (b)

6. Plasma

7. Surface Micromachining

8. Other Technologies

9. Polymer Micromachining

10. Classic Papers (a)

11. Classic Papers (b)

12. MEMS testing

13. Beams and Fracture

14. Resonators

Homework:  (NO COLLABORATION)

Problem Set	Due Date	Mean	STD. DEV.
HW1	April 15^th at 5pm	94	5
HW2	April 22^nd at 5pm	89	15
HW3	April 29^th at 5pm	92	5
HW4	May 6^th at 5pm	97	2
HW5	May 13^th at 5pm	38	2
HW6	May 20^th at 5pm
HW7	May 29^th at 5pm

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