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Overview |
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The Caltech Micromachining Laboratory is associated jointly with the Department of Electrical Engineering in the Engineering and Applied Science Division at California Institute of Technology The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. Successfully developed MEMS devices in Dr. Tai's lab include pressure sensors, shear-stress sensors, hot-wire anemometers, magnetic actuators, microphones, microvalves, micromotors, and so on. System-level MEMS research projects include integrated M3 (microelectronics + microsensors + microactuators) drag-reduction smart surface, flexible smart skin for the control unmanned aerial vehicles, and micro fluid delivery systems. Dr. Tai is also interested in MEMS sciences such as MEMS material (mechanical and thermal) properties, micro fluid mechanics, and micro/nano processing issues. Our lab is now open for industrial users, for general information and application, please download our LAB USAGE POLICY FOR MORE INFORMATION PLEASE CONTACT US AT: WEBMASTER:
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News: October
2009 Micromachining Lab welcomes new students!
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