Underwater Shear-Stress Sensor Caltech Micromachining Laboratory

Project Abstract

This paper reports the development of a micromachined, vacuum-cavity insulated, thermal shear-stress sensor for underwater applications. This paper is focused on the two major challenges for underwater shear-stress sensors: the waterproof coating and pressure sensitivity. It is found that thin-film CVD Parylene is a good waterproof material and sensors coated with 2 mm Parylene N can survive in water for at least one month at 55 °C. It is also found that reducing the size and increasing the thickness of the sensor diaphragm are effective in minimizing the pressure sensitivity.

Involved Personnel

Yong Xu, Fukang Jiang, Qiao Lin, Jason Clendenen, Steve Tung and Yu-Chong Tai

Related Publications

  • Jiang, F., et al. Flexible shear stress sensor skin for aerodynamics applications. in IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2000. Miyazaki, Japan. p. 364-369
  • Tsao, T., et al., MEMS-Based Active Drag Reduction in Turbulent Boundary Layers, in Microengineering Aerospace Systems, H. Helvajian, Editor. 1999, The Aerospace Press. p. 553-580.
  • Xu, Y., et al. A Surface Micromachined Nitride-Diaphragm High-Pressure Sensor for Oil Well Application. in ASME International Mechanical Engineering Congress and Exposition. 2000. Orlando, Florida. p. 425-429
  • Xu, Y., et al. Mass Flowmeter Using a Multi-Sensor Chip. in IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2000. Miyazaki, Japan. p. 541-546
  • Jiang, F., et al. A Surface-Micromachined Shear Stress Imager. in IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 1996. San Diego, CA. p. 110-115