Caltech Micromachining Laboratory A Parylene MEMS Flow Sensing Array

Project Abstract

We have demonstrated the first parylene MEMS thermal sensor array capable of detecting flows as small as 0.5 ml/min. The device is fabricated using low-temperature parylene/platinum technology and consists of metallic sensors suspended on a membrane over a bulk micromachined silicon channel. For the first time, insightful results from three different methods of flow sensing using a single device are studied and compared. Multi-mode testing using hot film, calorimetric, and time-of-flight techniques at low overheat ratios has been performed. Thus, this device is biocompatible in both construction and operation.

References

E. Meng and Y.C. Tai,"A Parylene MEMS Flow Sensing Array," Technical Digest, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), Boston, USA, pp. 686-689 (2003).

Involved Personnel

Ellis Meng and Yu-Chong Tai

Related Publications

  • Meng, E., S. Wu, and Y.-C. Tai, Silicon couplers for microfluidic applications. Fresenius Journal of Analytical Chemistry, 2001. 371(2): p. 270-275.

  • Meng, E., S. Gassmann, and Y.-C. Tai, A MEMS Body Fluid Flow Sensor, in Micro Total Analysis Systems 2001. 2001: Monterey, CA. p. 167-168.